Elastocapillary Folding of Three Dimensional Micro-structures Using Water Pumped through the Wafer via a Silicon Nitride Tube

In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated micro-structures were successfully folded using this method. The potential of this technique for batch self-assembly is discussed.